Mô tả
Capable of dispensing highly-viscous photoresist in LED or MEMS manufacturing
Features
- High repeatability of ±0.5% (F.S.). Highly accurate repeatability of ±0.5% (F.S. ) is possible thanks to a high performance stepping motor. Excess use of photoresist is eliminated, and uniform application of liquid is assured.
- Suitable for highly-viscous photoresist in LED and MEMS production.Rated for viscosities up to 10,000mPa·s used in manufac tur ing processes including LED and MEMS. And also for filling electrolysis solution.
- Safety design with a built-in pressure sensor. A built-in pressure sensor detects excessive pressure rise in the pump head for the prevention of accident caused by over pressurization.
Specifications
| Max. discharge capacity | 12.0 mL/shot |
|---|---|
| Discharge speed | 0.5 – 2.0 mL/sec |
| Suction speed | 0.3 – 2.0 mL/sec |
| Max. discharge pressure | 1.0 MPa |
| Repeatability | ±0.5 % or below (F.S.) |
| Main materials | PTFE |
| Allowable viscosity range | 100 – 10,000 mPa·s |








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